Title:
LIQUID JETTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/119961
Kind Code:
A1
Abstract:
A liquid jetting apparatus is provided with: a reservoir section (20) which stores a treatment liquid; a slit-like opening section (41) which jets the treatment liquid; and a connecting channel (42) which has a slit-like cross-section and connects together the reservoir section (20) and the slit-like opening section (41). The liquid jetting apparatus is also provided with: a valve section (50), which covers the connecting channel (42) in the reservoir section (20), forms a space (22) between the valve section and the lower wall (43) of the reservoir section (20), and makes the treatment liquid flow into the connecting channel (42) from the space (22); a first curved surface section (44a) which smoothly connects together the surface of the lower wall (43) of the reservoir section (20) and the inner wall surface (42a) of the connecting channel (42); and a second curved surface section (51a), which is provided on the the valve section (50) and protrudes to the same side as the first curved surface section (44a).
With such configuration, inclusion of bubbles in the treatment liquid jetted from the slit-like opening section (41) can be suppressed.
Inventors:
KOUKETSU MASAYUKI (JP)
ITAFUJI HIROSHI (JP)
ITAFUJI HIROSHI (JP)
Application Number:
PCT/JP2010/056871
Publication Date:
October 21, 2010
Filing Date:
April 16, 2010
Export Citation:
Assignee:
CKD CORP (JP)
KOUKETSU MASAYUKI (JP)
ITAFUJI HIROSHI (JP)
KOUKETSU MASAYUKI (JP)
ITAFUJI HIROSHI (JP)
International Classes:
B05C5/02; H01L21/306
Foreign References:
| JP2002361151A | 2002-12-17 | |||
| JPS56138571A | 1981-10-29 | |||
| JP2003024854A | 2003-01-28 | |||
| JPS4614776B1 | 1971-04-20 |
Attorney, Agent or Firm:
YAMADA, TSUYOSHI (JP)
Yamada Strength (JP)
Yamada Strength (JP)
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