Title:
LIQUID MATERIAL ATOMIZATION AND SUPPLY DEVICE AND CONTROL PROGRAM
Document Type and Number:
WIPO Patent Application WO/2018/207553
Kind Code:
A1
Abstract:
The present invention makes it possible to eliminate the need to carry out calibration according to the type of material gas and therefore accurately control flow rate even for a material gas for which there is no calibration data. A liquid material atomization and supply device is provided with: a first tank for generating the material gas by atomizing liquid material; a second tank connected to the first tank and accommodating the material gas generated in the first tank at a prescribed pressure; a pressure sensor for detecting the pressure in the second tank; a lead-out path for guiding the material gas from the second tank; a fluid control valve disposed in the lead-out path and opening and closing that lead-out path; and a flow rate control unit for controlling the flow rate of the material gas guided from the lead-out path by controlling the degree of opening of the fluid control valve on the basis of detected pressure reduction detected by the pressure sensor when the material gas accommodated at the prescribed pressure in the second tank is guided from the lead-out path.
Inventors:
MIYAMOTO HIDEAKI (JP)
Application Number:
PCT/JP2018/015588
Publication Date:
November 15, 2018
Filing Date:
April 13, 2018
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
B01J7/02; C23C16/448; G05D7/01; H01L21/205; B01F23/10
Foreign References:
| JPH03141192A | 1991-06-17 | |||
| JPS54162295A | 1979-12-22 | |||
| JPS60244332A | 1985-12-04 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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