Title:
LIQUID MICROMETER
Document Type and Number:
WIPO Patent Application WO/2019/031532
Kind Code:
A1
Abstract:
The liquid micrometer according to the present invention is characterized by having: a liquid channel 30 for supplying a liquid to a discharge nozzle 20 from a liquid supply means 10; a flow rate sensor 40 provided to the liquid channel 30; a control valve 50 provided to the liquid channel 30 between the liquid supply means 10 and the flow rate sensor 40; a control unit 60 for controlling the control valve 50 such that the flow rate measured by the flow rate sensor 40 is equal to a set value; a pressure sensor 70 for measuring the pressure of the liquid ejected from the discharge nozzle 20; and a calculation unit 80 for calculating the dimensions of a workpiece A from a pressure measured by the pressure sensor 70 while the flow rate is kept at the set value by the control unit.
Inventors:
YOSHIKAWA KAZUHIRO (JP)
ASANO MAKIO (JP)
HASHIMOTO HITOMI (JP)
TSUZUKI TAKUYA (JP)
SASAO KIMIHITO (JP)
ASANO MAKIO (JP)
HASHIMOTO HITOMI (JP)
TSUZUKI TAKUYA (JP)
SASAO KIMIHITO (JP)
Application Number:
PCT/JP2018/029698
Publication Date:
February 14, 2019
Filing Date:
August 08, 2018
Export Citation:
Assignee:
ACE INC (JP)
ADVANCE DENKI KOGYO KK (JP)
ADVANCE DENKI KOGYO KK (JP)
International Classes:
G01B13/02
Foreign References:
| US20110209529A1 | 2011-09-01 | |||
| JPS60171511A | 1985-09-05 | |||
| JPS60158208U | 1985-10-21 | |||
| JP2007212444A | 2007-08-23 |
Attorney, Agent or Firm:
ABE Shinichi et al. (JP)
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