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Title:
LIQUID SUPPLY DEVICE AND LIQUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2023/142325
Kind Code:
A1
Abstract:
A liquid supply device, comprising: a first liquid supply structure (11), comprising a first supply port for supplying a first treatment liquid; a second liquid supply structure (12), comprising a second supply port for supplying a second treatment liquid; a first liquid supply circuit connected to the first liquid supply structure (11) and the second liquid supply structure (12); a second liquid supply circuit, at least connected to the second liquid supply structure (12); and a control structure, at least comprising a first control assembly and a second control assembly, the first control assembly being used for controlling whether the first supply port of the first liquid supply structure is communicated with the first liquid supply circuit, and the second control assembly being used for controlling whether the second supply port of the second liquid supply structure is communicated with the second liquid supply circuit and whether the second supply port is communicated with the first liquid supply circuit. According to the liquid supply device and a liquid supply method thereof, the control structure can implement rapid switching between the first treatment liquid and the second treatment liquid, achieving rapid switching of treatment liquid; flowing of the first treatment liquid in the first liquid supply circuit and flowing of the second treatment liquid in the second liquid supply circuit can be achieved at the same time, the two treatment liquids are supplied simultaneously, and the application fields of the liquid supply device is greatly expanded.

Inventors:
ZHANG ZHENGXIAN (CN)
KU CHIN-CHUNG (CN)
Application Number:
PCT/CN2022/096759
Publication Date:
August 03, 2023
Filing Date:
June 02, 2022
Export Citation:
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Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B67D7/78; B67D7/02; F17D1/08
Foreign References:
US20150210522A12015-07-30
CN102458699A2012-05-16
CN1561441A2005-01-05
CN1256241A2000-06-14
CN111483969A2020-08-04
Attorney, Agent or Firm:
SHANGHAI WINSUN INTELLECTUAL PROPERTY AGENCY (CN)
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