LIQUID SUPPLY DEVICE AND POLISHING DEVICE

Title:

LIQUID SUPPLY DEVICE AND POLISHING DEVICE

Document Type and Number:

WIPO Patent Application WO/2022/009700

Kind Code:

A1

Abstract:

This liquid supply device comprises: a rocking arm that can horizontally rock the upper side of a polishing table; a slurry tube that extends in the longitudinal direction of the rocking arm and discharges slurry onto the polishing table from a slurry discharge port at a tip section thereof; and a plurality of spray nozzles which are provided to be aligned in the longitudinal direction of the rocking arm and spray a cleaning fluid onto the polishing table. The spray nozzles positioned at the tip section of the rocking arm are provided obliquely so as to be capable of cleaning a drop position of slurry onto the polishing table, the slurry being discharged from the slurry discharge nozzles.

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Inventors:

YAMAGUCHI KUNIAKI (JP)
ISOBE SOICHI (JP)
SHINKAI KENJI (JP)
YOSHINARI DAI (JP)
TAMURA MASAYUKI (JP)

Application Number:

PCT/JP2021/024136

Publication Date:

January 13, 2022

Filing Date:

June 25, 2021

Export Citation:

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Assignee:

EBARA CORP (JP)

International Classes:

B24B57/02; B24B37/00; B24B53/017; B24B55/06; H01L21/304

Foreign References:

JPH1170464A	1999-03-16
JP2014111301A	2014-06-19
JP2002299293A	2002-10-11
US20150190899A1	2015-07-09

Attorney, Agent or Firm:

OHNO Seiji et al. (JP)

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