Title:
LOW-TEMPERATURE FABRICATION OF THIN-FILM ENERGY-STORAGE DEVICES
Document Type and Number:
WIPO Patent Application WO2001073883
Kind Code:
A9
Abstract:
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step, especially a cathode anneal of thin-film batteries. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of film. For lithium-ion energy-storage devices, the first material is an intercalation material, which releasably stores lithium ions therein. Supercapacitors and energy-conversion devices are also fabricated according to the methods.
Inventors:
JENSON MARK LYNN (US)
JACOBS HARLAN THEODORE (US)
JACOBS HARLAN THEODORE (US)
Application Number:
PCT/US2001/009595
Publication Date:
December 19, 2002
Filing Date:
March 23, 2001
Export Citation:
Assignee:
CYMBET CORP (US)
JENSON MARK LYNN (US)
JACOBS HARLAN THEODORE (US)
JENSON MARK LYNN (US)
JACOBS HARLAN THEODORE (US)
International Classes:
A61N1/378; B05C11/00; B05D5/12; C23C14/00; C23C14/06; C23C14/08; C23C16/00; C23C16/04; H01G9/00; H01G9/02; H01G9/025; H01G9/038; H01G9/155; H01L21/00; H01L21/302; H01L21/461; H01L23/58; H01L31/00; H01L31/073; H01L31/18; H01M4/04; H01M4/1391; H01M4/48; H01M4/88; H01M4/90; H01M6/00; H01M6/18; H01M6/40; H01M6/46; H01M10/04; H01M10/0562; H01M10/0585; H01M10/36; H01M10/38; H01M10/42; H01M10/46; H01M14/00; H01M50/103; H01M50/209; H01M50/403; H04M1/02; A61N1/372; G02F1/133; H01M4/02; H01M4/1393; H01M4/1397; H01M4/40; H01M4/52; H01M4/58; H01M6/42; H01M8/10; H01M8/12; H01M10/44; H05K1/16; (IPC1-7): H01M10/00
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