Title:
MACHINE TOOL, OPTICAL SYSTEMS, AND MEASURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/162893
Kind Code:
A1
Abstract:
This machine tool comprises: a machining device provided with a main shaft to and from which a tool is attachable and detachable; and a measuring device capable of measuring the shape of an object by irradiating the object with first light and detecting second light from the object which was irradiated with the first light. The measuring device comprises: a first optical system, which is attached to a part that is different from the main shaft of the machining device and through which the first light and the second light pass; and a second optical system, which is detachably attached to the main shaft and which projects the first light from the first optical system towards the object as well as projecting the second light from the object towards the first optical system.
Inventors:
MASUI HITOSHI (JP)
SHIIBA MINORU (JP)
NAKA SHUNSUKE (JP)
OKUYAMA SUMIE (JP)
SUGITA MASAHIRO (JP)
TANIZAWA YUSUKE (JP)
SUZUKI YASUO (JP)
ARAI MASANORI (JP)
MORITA TAKAYUKI (JP)
KOHAMA YOSHIAKI (JP)
SHIIBA MINORU (JP)
NAKA SHUNSUKE (JP)
OKUYAMA SUMIE (JP)
SUGITA MASAHIRO (JP)
TANIZAWA YUSUKE (JP)
SUZUKI YASUO (JP)
ARAI MASANORI (JP)
MORITA TAKAYUKI (JP)
KOHAMA YOSHIAKI (JP)
Application Number:
PCT/JP2021/003343
Publication Date:
August 04, 2022
Filing Date:
January 29, 2021
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01B9/02; B23Q17/24; G01B11/24
Foreign References:
| JPH1144514A | 1999-02-16 | |||
| JPH11295046A | 1999-10-29 | |||
| JP2017515678A | 2017-06-15 | |||
| JPH1144517A | 1999-02-16 | |||
| JP2014001966A | 2014-01-09 | |||
| JPH0658710A | 1994-03-04 | |||
| JPH07198316A | 1995-08-01 | |||
| JP2020085717A | 2020-06-04 |
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
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