Title:
MACHINING METHOD AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/053187
Kind Code:
A1
Abstract:
This machining method includes: a machining step of irradiating a sample constituted from a stack of multiple layers with a focused ion beam so as to machine a cross-section of the sample by a predetermined amount; an image generation step of generating an observation image of the cross-section of the sample by irradiating the sample with an electron beam after the machining step is ended; and a specific-layer determination step of determining whether a specific layer of the multiple layers has been exposed or not on the basis of the observation image.
Inventors:
NAGAMINE TOSHIYUKI (JP)
UEMOTO ATSUSHI (JP)
ASAHATA TATSUYA (JP)
MAN XIN (JP)
UEMOTO ATSUSHI (JP)
ASAHATA TATSUYA (JP)
MAN XIN (JP)
Application Number:
PCT/JP2021/035604
Publication Date:
April 06, 2023
Filing Date:
September 28, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH SCIENCE CORP (JP)
International Classes:
H01J37/22; H01J37/305
Foreign References:
| JP2015525959A | 2015-09-07 | |||
| JP2015050126A | 2015-03-16 | |||
| US20190139735A1 | 2019-05-09 | |||
| JP2015111108A | 2015-06-18 |
Attorney, Agent or Firm:
TAZAKI Akira et al. (JP)
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