Title:
MAGNETIC FIELD GENERATION DEVICE AND SPUTTERING DEVICE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/043015
Kind Code:
A1
Abstract:
A magnetic field generation device, according to one embodiment, generates a magnetic field inside a chamber of a sputtering device. The magnetic field generation device may comprise: a housing which has an annular shape so as to surround a chamber, and is provided with a hollow therein; a guide which is penetratingly formed in the housing; a slider which is slidable along the guide; a cap which is connected to the slider; a magnet which is supported by the cap, is provided in the hollow of the housing, and is rotatable with respect to the housing; and a drive unit which rotates the magnet.
Inventors:
JEONG BYEONG HWA (KR)
PARK DA HEE (KR)
OH DO HYUN (KR)
PARK DA HEE (KR)
OH DO HYUN (KR)
Application Number:
PCT/KR2022/009211
Publication Date:
March 23, 2023
Filing Date:
June 28, 2022
Export Citation:
Assignee:
ULVAC KOREA CO LTD (KR)
International Classes:
H01J37/34; C23C14/35
Foreign References:
| KR20110062477A | 2011-06-10 | |||
| KR101555244B1 | 2015-09-24 | |||
| KR101284799B1 | 2013-07-10 | |||
| KR20190021511A | 2019-03-06 | |||
| KR20140019577A | 2014-02-17 |
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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