Title:
MAGNETIC FIELD MEASURING INSTRUMENT
Document Type and Number:
WIPO Patent Application WO/2022/259601
Kind Code:
A1
Abstract:
[Problem] To reduce labor for setting a range within which a magnetic field can be measured. [Solution] A magnetic field measuring instrument 1 measures a measurement target magnetic field. The magnetic field measuring instrument 1 comprises: a magnetic impedance element 10 in which an impedance change rate changes in accordance with a measurement target magnetic field; a driving signal applying unit 12 that applies a driving signal to the magnetic impedance element 10; and a measurement range setting unit 16 that sets a measurement range within which the measurement target magnetic field can be measured. The relationship between the measurement target magnetic field and the impedance change rate changes in accordance with the frequency of the driving signal. The measurement range setting unit 16 sets the measurement range by setting the frequency. Further, in the magnetic impedance element 10, as the frequency becomes higher, the maximum value of the impedance change rate becomes lower while the upper limit of the measurement target magnetic field that can be measured becomes higher.
Inventors:
HATA YOSHIYUKI (JP)
HORI HISAO (JP)
KAKINUMA BUNICHI (JP)
HORI HISAO (JP)
KAKINUMA BUNICHI (JP)
Application Number:
PCT/JP2022/003770
Publication Date:
December 15, 2022
Filing Date:
February 01, 2022
Export Citation:
Assignee:
ADVANTEST CORP (JP)
International Classes:
H01L43/00; G01R33/02
Foreign References:
| JP2005062000A | 2005-03-10 | |||
| JP2015145800A | 2015-08-13 | |||
| JP2008076286A | 2008-04-03 | |||
| JP2010078343A | 2010-04-08 | |||
| JP2003035757A | 2003-02-07 | |||
| JP2003177167A | 2003-06-27 | |||
| JP2010256109A | 2010-11-11 | |||
| CN106291406A | 2017-01-04 |
Attorney, Agent or Firm:
HOSODA Masutoshi (JP)
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