Title:
MAGNETIC LEVITATION GRAVITY COMPENSATION DEVICE AND MOVING TABLE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2022/116393
Kind Code:
A1
Abstract:
Disclosed in the present invention is a magnetic levitation gravity compensation device, comprising: an inner-based magnetic steel, the inner-based magnetic steel extending axially; a first end magnetic steel and a second end magnetic steel, the first end magnetic steel and the second end magnetic steel being respectively located at two axial ends of the inner-based magnetic steel and extending axially, and outer diameters of the first end magnetic steel and the second end magnetic steel respectively gradually increasing in the directions distant from the two axial ends of the inner-based magnetic steel; and an outer magnetic ring magnetic steel, the outer magnetic ring magnetic steel being cylindrical, and the outer magnetic ring magnetic steel and the inner-based magnetic steel being coaxially located outside the inner-based magnetic steel, and being radially spaced apart from each other. In the present invention, the characteristic that a magnetic levitation output force is linear along a stroke is implemented, and at a null point, the output force can counteract the gravity of a vertical structure. The invention can not only compensate the gravity of a vertical moving mechanism, but also implement constant rigidity compensation on the basis of magnetic field linearization, the elastic deformation reaction force of a flexible mechanism is balanced within a stroke range, the load of a vertical actuator is reduced, and the vertical performance of a micro-positioner is greatly improved.
Inventors:
HU BING (CN)
JIANG XUCHU (CN)
YUAN JIAXIN (CN)
JIANG YUN (CN)
JIANG XUCHU (CN)
YUAN JIAXIN (CN)
JIANG YUN (CN)
Application Number:
PCT/CN2021/076424
Publication Date:
June 09, 2022
Filing Date:
February 10, 2021
Export Citation:
Assignee:
YINGUAN SEMICONDUCTOR TECH CO LTD (CN)
International Classes:
H01L21/683; H02N15/00
Foreign References:
| CN105988304A | 2016-10-05 | |||
| CN102859215A | 2013-01-02 | |||
| CN112201611A | 2021-01-08 | |||
| US20100026431A1 | 2010-02-04 |
Attorney, Agent or Firm:
SHANGHAI GOOIP CO., LTD. (CN)
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