Title:
MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/012940
Kind Code:
A1
Abstract:
Provided are a magnetic sensor and a manufacturing method thereof. The magnetic sensor includes at least one magnetic sensor structure, wherein, each magnetic sensor structure includes at least one magnetic sensor group (10), each magnetic sensor group (10) includes two magnetic sensor units (11, 12), each magnetic sensor unit (11, 12) includes a sensing structure and a heating structure connected in series, each sensing structure includes a stacked free layer (1004) and a reference layer (1006), the magnetization directions of the reference layers (1006) of the two magnetic sensor units (11, 12) in each magnetic sensor group (10) are opposite. Therefore, the technical problems that it is difficult for the magnetic sensor (10) to realize the opposite magnetization direction of the reference layer on the same bare chip in the related technology, and low sensitivity and reliability are solved.
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Inventors:
SUN YIHUI (CN)
LIU BO (CN)
LI HUIHUI (CN)
LIU BO (CN)
LI HUIHUI (CN)
Application Number:
PCT/CN2020/100504
Publication Date:
January 28, 2021
Filing Date:
July 06, 2020
Export Citation:
Assignee:
ZHEJIANG HIKSTOR TECH CO LTD (CN)
International Classes:
H01L43/08; H01L27/22
Foreign References:
| CN104103753A | 2014-10-15 | |||
| CN105280809A | 2016-01-27 | |||
| CN108226822A | 2018-06-29 | |||
| CN108028315A | 2018-05-11 | |||
| US20140367814A1 | 2014-12-18 |
Attorney, Agent or Firm:
KANGXIN PARTNERS, P.C. (CN)
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