Title:
MAGNETIC SENSOR, AND MAGNETIC SENSOR SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/075426
Kind Code:
A1
Abstract:
A magnetic sensor 1 is characterized by being provided with a thin film magnet 20 configured using an electrical conductor, a dielectric layer 104 configured using a dielectric and stacked on the thin film magnet 20, and a sensing portion 30 provided with a sensing element 31 which is configured using a soft magnetic layer, is stacked on the dielectric layer 104 in such a way as to face the thin film magnet 20 across the dielectric layer 104, has a longitudinal direction and a lateral direction, has uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, and senses a magnetic field by means of a magnetic impedance effect, wherein, if a high-frequency current is supplied to the sensing element 31, the electrostatic capacitance thereof varies in accordance with the magnetic field being sensed by the sensing element 31.
Inventors:
ENDO DAIZO (JP)
SHINO TATSUNORI (JP)
OHASHI HARUHISA (JP)
KINOSHITA SHIGEHIRO (JP)
SHINO TATSUNORI (JP)
OHASHI HARUHISA (JP)
KINOSHITA SHIGEHIRO (JP)
Application Number:
PCT/JP2019/035030
Publication Date:
April 16, 2020
Filing Date:
September 05, 2019
Export Citation:
Assignee:
SHOWA DENKO KK (JP)
International Classes:
G01R33/02; H01L43/00; H01L43/10
Foreign References:
| JP2008197089A | 2008-08-28 | |||
| JP2008249406A | 2008-10-16 | |||
| JPH1090382A | 1998-04-10 | |||
| JP2000180520A | 2000-06-30 | |||
| JP2018031724A | 2018-03-01 | |||
| US20100007343A1 | 2010-01-14 |
Attorney, Agent or Firm:
FURUBE, Jiro et al. (JP)
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