Title:
MAGNETIC SHIELDING DEVICE AND ELECTRON BEAM DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/151327
Kind Code:
A1
Abstract:
Embodiments of the present application provide a magnetic shielding device and an electron beam detection device. The magnetic shielding device comprises at least one first magnetic shielding piece. The first magnetic shielding piece is spirally wound on the periphery of the travel path of an electron beam. The first magnetic shielding piece is used for shielding a magnetic field in the travel path of the electron beam. The magnetic shielding device and the electron beam detection device provided by the embodiments of the present application can reduce the horizontal magnetic flux density perpendicular to the electron beam at an end of the magnetic shielding piece, improve the magnetic shielding effect of the magnetic shielding piece, and enhance the imaging quality of the electron beam detection device.
Inventors:
ZHAO ZHIDONG (CN)
YANG CHEN (CN)
LIU RONGJIANG (CN)
YANG CHEN (CN)
LIU RONGJIANG (CN)
Application Number:
PCT/CN2022/130834
Publication Date:
August 17, 2023
Filing Date:
November 09, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H05K9/00
Foreign References:
| US20130001419A1 | 2013-01-03 | |||
| CN104349653A | 2015-02-11 | |||
| JP2001281311A | 2001-10-10 |
Attorney, Agent or Firm:
LEADER PATENT & TRADEMARK FIRM (CN)
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