Title:
MAGNETIC STORAGE APPARATUS AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/035156
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application are a magnetic storage apparatus and a preparation method therefor. The method comprises: forming a plurality of bottom electrodes and a plurality of insulators on a substrate, wherein adjacent bottom electrodes among the plurality of bottom electrodes are insulated from each other by means of a corresponding insulator among the plurality of insulators; forming a polarization layer film on the plurality of bottom electrodes and the plurality of insulators; forming a magnetic tunnel junction layer on the polarization layer film; forming a structure mask pattern at the position on the magnetic tunnel junction layer covering the insulators; and by using the structure mask pattern as an etching mask, executing an etching process to etch the polarization layer film and the magnetic tunnel junction layer, so as to form a structure that connects two adjacent bottom electrodes, wherein the structure comprises a polarization layer and a magnetic tunnel junction. By means of the embodiments of the present application, etching does not need to accurately stop above a polarization layer when a magnetic tunnel junction is formed, thereby reducing the difficulty of the process. In addition, it is unnecessary to control the polarization layer to be sufficiently thick, so that the thickness of the polarization layer can be reduced, thereby reducing a write current and power consumption.
Inventors:
XIANG QINGYI (CN)
YE LI (CN)
WENG ZHENHUA (CN)
LI WENJING (CN)
YE LI (CN)
WENG ZHENHUA (CN)
LI WENJING (CN)
Application Number:
PCT/CN2021/117298
Publication Date:
March 16, 2023
Filing Date:
September 08, 2021
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H01L43/14; H01L43/08; H01L27/22
Foreign References:
| US20210104663A1 | 2021-04-08 | |||
| CN111211220A | 2020-05-29 | |||
| CN105280214A | 2016-01-27 | |||
| CN111653664A | 2020-09-11 |
Attorney, Agent or Firm:
SHENZHEN SCIENBIZIP INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
Download PDF: