Title:
MAGNETIC STORAGE UNIT AND PREPARATION METHOD THEREFOR, AND MAGNETIC MEMORY
Document Type and Number:
WIPO Patent Application WO/2022/142672
Kind Code:
A1
Abstract:
A magnetic storage unit and a preparation method thereof, and a magnetic memory. Said method comprises sequentially providing a magnetic free layer, an insulating tunnel layer, a magnetic reference layer and a mask layer outwardly on the surface of a preset spin-orbit torque metal matrix precursor, so as to obtain a unit to be etched; etching the mask layer, the magnetic reference layer, the insulating tunnel layer and the magnetic free layer, so as to obtain an etched workpiece comprising a columnar epitaxial layer; providing a protection layer on the surface of the etched workpiece; performing directional oxygen ion treatment on the spin-orbit torque metal matrix precursor on which the protection layer has been provided; performing surface reduction on the peripheral oxide layer; and removing the protection layer above the mask layer of a precursor of the storage unit, so as to obtain a magnetic storage unit. The present invention avoids the problem in the prior art of poor uniformity of thickness of a spin-orbit torque metal matrix for directly producing a target thickness.
Inventors:
HE SHIKUN (CN)
ZHENG ZEJIE (CN)
ZHOU YAXING (CN)
ZHENG ZEJIE (CN)
ZHOU YAXING (CN)
Application Number:
PCT/CN2021/127355
Publication Date:
July 07, 2022
Filing Date:
October 29, 2021
Export Citation:
Assignee:
ZHEJIANG HIKSTOR TECH CO LTD (CN)
International Classes:
H01L27/32; H01L43/06
Foreign References:
| US20200161542A1 | 2020-05-21 | |||
| CN111682106A | 2020-09-18 | |||
| CN109742229A | 2019-05-10 | |||
| CN110010637A | 2019-07-12 | |||
| CN109727623A | 2019-05-07 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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