Title:
MAGNETIC SUSPENSION DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/207031
Kind Code:
A1
Abstract:
Provided are a magnetic suspension device and a semiconductor processing apparatus. A stator (20) of the magnetic suspension device comprises at least three magnetic stator substrates (201), permanent magnets (202) and magnetizers (203), wherein the at least three magnetic stator substrates (201) are spaced apart from each other in an axial direction of the stator (20) to define at least two gaps (201'), and the permanent magnets (202) and the magnetizers (203) are alternately arranged in the at least two gaps (201'); each of the at least three magnetic stator substrates (201) comprises a protruding portion (2012), which protrudes towards a rotor (10) and protrudes out of the permanent magnet (202) and the magnetizer (202) and is wound with a magnetic suspension coil (2012c); the protruding portions (2012) of first magnetic stator substrates (201a) in the at least three magnetic stator substrates (201) and the magnetic suspension coils (2012c) apply an upward force to the rotor (10) in the axial direction of the stator (20); and the ratio of the number of the first magnetic stator substrates (201a) to the total number of the at least three magnetic stator substrates (201) is greater than or equal to 50%.
Inventors:
YIN CHENGKE (CN)
Application Number:
PCT/CN2022/130897
Publication Date:
November 02, 2023
Filing Date:
November 09, 2022
Export Citation:
Assignee:
SUZHOU SUPERMAG INTELLIGENT TECH CO LTD (CN)
International Classes:
F16C32/00; H02N15/00; H02K1/14; H02K1/17; H02K3/52; H02K5/00; H02K7/00; H02K15/00; H02K16/00
Foreign References:
| CN114826025A | 2022-07-29 | |||
| CN114221580A | 2022-03-22 | |||
| JP2011158021A | 2011-08-18 | |||
| US20140265698A1 | 2014-09-18 |
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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