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Patent Searching and Data


Title:
MAINTENANCE APPARATUS, MAINTENANCE METHOD, AND MAINTENANCE PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/065843
Kind Code:
A1
Abstract:
Provided is a maintenance apparatus comprising: an acquisition unit for acquiring, for each of a plurality of jigs, a plurality of test results obtained by sequentially testing, through the plurality of jigs, a plurality of different devices to be measured; a calculation unit that, using the plurality of test results, calculates the variation in test results for each of the jigs; and a determining unit for determining the jig maintenance timing on the basis of the variation in test results.

Inventors:
SUGIMURA HAJIME (JP)
SAKAI YUJI (JP)
Application Number:
JP2020/036748
Publication Date:
April 08, 2021
Filing Date:
September 28, 2020
Export Citation:
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Assignee:
ADVANTEST CORP (JP)
International Classes:
H01L21/66; G01R31/26; G01R31/28
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (1-6-1 Nishi-Shinjuku, Shinjuku-k, Tokyo 22, JP)
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