Title:
MAINTENANCE APPARATUS, MAINTENANCE METHOD, AND MAINTENANCE PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/065843
Kind Code:
A1
Abstract:
Provided is a maintenance apparatus comprising: an acquisition unit for acquiring, for each of a plurality of jigs, a plurality of test results obtained by sequentially testing, through the plurality of jigs, a plurality of different devices to be measured; a calculation unit that, using the plurality of test results, calculates the variation in test results for each of the jigs; and a determining unit for determining the jig maintenance timing on the basis of the variation in test results.
Inventors:
SUGIMURA HAJIME (JP)
SAKAI YUJI (JP)
SAKAI YUJI (JP)
Application Number:
PCT/JP2020/036748
Publication Date:
April 08, 2021
Filing Date:
September 28, 2020
Export Citation:
Assignee:
ADVANTEST CORP (JP)
International Classes:
H01L21/66; G01R31/26; G01R31/28
Domestic Patent References:
| WO2018139144A1 | 2018-08-02 | |||
| WO2007105387A1 | 2007-09-20 |
Foreign References:
| JP2003282654A | 2003-10-03 | |||
| JP2007248200A | 2007-09-27 | |||
| US20130300429A1 | 2013-11-14 | |||
| US20110148446A1 | 2011-06-23 | |||
| JP2005175154A | 2005-06-30 | |||
| JP2011179342A | 2011-09-15 | |||
| JP2001326258A | 2001-11-22 | |||
| JP2006105924A | 2006-04-20 | |||
| JP2011258651A | 2011-12-22 | |||
| JP2003098226A | 2003-04-03 |
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
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