MANAGEMENT METHOD, MEASUREMENT METHOD, MEASUREMENT DEVICE, CRYSTAL OSCILLATOR SENSOR, AND SET

WIPO Patent Application WO/2021/131633

A1

The present invention provides: a management method by which the purity of chemical solutions containing organic solvents can be more conveniently managed; a measurement method; a measurement device; a crystal oscillator sensor; and a set. The management method according to the present invention is for detecting impurities in a chemical solution containing an organic solvent so as to manage the purity of the chemical solution, the method comprising: a step 1 for preparing a target chemical solution containing an organic solvent; a step 2 for bringing an adsorptive layer that adsorbs impurities, a crystal oscillator sensor that comprises a crystal oscillator, and the target chemical solution into contact, and obtaining the level of change in the resonant frequency of the crystal oscillator resulting from the contact with the target chemical solution; and a step 3 for comparing whether the obtained level of change in resonant frequency falls within a preset allowable range of level of change in resonant frequency that is based on the purity of the target chemical solution, and managing the purity of the chemical solution thereby. In step 2, at least a portion of a liquid-contacting part that contacts the target chemical solution is formed from a fluororesin.

KAMIMURA TETSUYA (JP)

PCT/JP2020/045451

July 01, 2021

December 07, 2020

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FUJIFILM CORP (JP)

G01N5/02

JPH04116455A	1992-04-16
JP2020159784A	2020-10-01
JPH06194290A	1994-07-15
JP2007263564A	2007-10-11
JP2011237295A	2011-11-24
JPH0618394A	1994-01-25

ITOH Hideaki et al. (JP)

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