Title:
MANUFACTURING DEVICE AND MANUFACTURING METHOD FOR TREATING RAW MATERIAL WITH MICROWAVE SURFACE WAVE PLASMA AND OBTAINING PRODUCT DIFFERENT FROM RAW MATERIAL
Document Type and Number:
WIPO Patent Application WO/2019/239765
Kind Code:
A1
Abstract:
In order to provide a manufacturing device and a manufacturing method for treating a raw material with microwave surface wave plasma and obtaining a product different from the raw material, wherein the manufacturing device is suitable from the standpoint of usage efficiency of the raw material or high purification of the product, this manufacturing device for treating a raw material with microwave surface wave plasma in a reaction chamber and obtaining a product different from the raw material is provided with: a reaction chamber in which the raw material is treated with the microwave surface wave plasma; a first air discharge port provided to the reaction chamber, the air discharge port discharging air inside the reaction chamber; an air supply port provided to the reaction chamber, the air supply port supplying air that is for forming microwave surface wave plasma into the reaction chamber; a microwave generation means that generates microwaves for producing microwave surface wave plasma; a first window provided in a portion at which microwaves enter the reaction chamber, the first window being made from a dielectric material that produces microwave surface wave plasma at the surface thereof; and a first Lorentz-force generation means that forms a Lorentz force for suppressing the discharge of first ions used in production of the product.
Inventors:
TAKIZAWA TSUTOMU (JP)
USUKI HIROKAZU (JP)
SHIRANE TAKASHI (JP)
MORIMOTO MINEO (JP)
SAKAMOTO YUICHI (JP)
USUKI HIROKAZU (JP)
SHIRANE TAKASHI (JP)
MORIMOTO MINEO (JP)
SAKAMOTO YUICHI (JP)
Application Number:
PCT/JP2019/019061
Publication Date:
December 19, 2019
Filing Date:
May 14, 2019
Export Citation:
Assignee:
SE CORP (JP)
International Classes:
B01J19/08; C01B6/04; H05H1/46
Foreign References:
| JPS593018A | 1984-01-09 | |||
| JPH01225041A | 1989-09-07 | |||
| JPS57133636A | 1982-08-18 | |||
| JPH02263799A | 1990-10-26 | |||
| JPH04505684A | 1992-10-01 | |||
| JPS6153719A | 1986-03-17 | |||
| JP2008071528A | 2008-03-27 |
Attorney, Agent or Firm:
SAKAMOTO & PARTNERS (JP)
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