Title:
MANUFACTURING METHOD AND MANUFACTURING DEVICE OF SUPERCONDUCTING THIN FILM WIRE
Document Type and Number:
WIPO Patent Application WO/2019/198402
Kind Code:
A1
Abstract:
The present invention provides a manufacturing method of a superconducting thin film wire which improves crystallinity and properties of a thin film of a compound comprising elements with very different vapor pressures. The manufacturing method of a superconducting thin film wire involves manufacturing a thin film from a first substance and a second substance which has a melting point or a vapor pressure that is higher than that of the first substance and comprises: a first step of forming a reaction preventing film on a metal substrate; a second step of heat depositing or sputtering the first substance in a direction parallel to a surface of the metal substrate; and a third step of sputtering the second substance or the first substance and the second substance.
Inventors:
IWANAKA TAKUMU (JP)
KUSUNOKI TOSHIAKI (JP)
KUSUNOKI TOSHIAKI (JP)
Application Number:
PCT/JP2019/009677
Publication Date:
October 17, 2019
Filing Date:
March 11, 2019
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H01B13/00; C23C14/34; H01L39/24
Foreign References:
| JP2002352649A | 2002-12-06 | |||
| JP2007521397A | 2007-08-02 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
Download PDF: