Title:
MANUFACTURING METHOD FOR MAGNETIC TUNNEL JUNCTION
Document Type and Number:
WIPO Patent Application WO/2021/018258
Kind Code:
A1
Abstract:
A manufacturing method for a Magnetic Tunnel Junction (MTJ). The manufacturing method comprises steps for forming a reference layer (10), a barrier layer (20), and a free layer (30). The step for forming the barrier layer (20) comprises: S1, forming a first magnesium oxide layer, on the surface of the reference layer (10) or the free layer (30) by using a radio frequency magnetron sputtering process, as a crystallization induction layer (210); S2, forming a second magnesium oxide layer (230) on the surface of the crystallization induction layer (210) by using a direct current magnetron sputtering process and an oxidation process. The manufacturing method further comprises a step for performing first heat treatment on the reference layer (10), the barrier layer (20), and the free layer (30) together. The first magnesium oxide layer formed by means of deposition by using the radio frequency magnetron sputtering process is usually in a polycrystalline state and has a certain (001) orientation in a freshly deposited state, so as to use the first magnesium oxide layer as the crystallization induction layer (210) for facilitating forming a (001) MgO structure on the surface of the first magnesium oxide layer, so that the reference layer (10), the barrier layer (20), and the free layer (30) have the (001) orientation, the spin filtering efficiency and a TMR value of the MTJ are improved, and good reading and writing characteristics are obtained.
Inventors:
JIANG XIN (CN)
JIAN HONG (CN)
JIAN HONG (CN)
Application Number:
PCT/CN2020/105928
Publication Date:
February 04, 2021
Filing Date:
July 30, 2020
Export Citation:
Assignee:
ZHEJIANG HIKSTOR TECH CO LTD (CN)
International Classes:
H01L43/12
Foreign References:
| CN103000805A | 2013-03-27 | |||
| CN102203971A | 2011-09-28 | |||
| CN108028315A | 2018-05-11 | |||
| CN108780781A | 2018-11-09 | |||
| US20070111332A1 | 2007-05-17 |
Attorney, Agent or Firm:
KANGXIN PARTNERS, P.C. (CN)
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