Title:
MANUFACTURING METHOD FOR SURFACE RELIEF GRATING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2021/031106
Kind Code:
A1
Abstract:
The present invention provides a manufacturing method for a surface relief grating structure. The method comprises processes of substrate glue-coating, motherboard imprinting, imprinting glue film-coating, imprinting glue removal and substrate etching. By directly imprinting a first grating structure on a motherboard to obtain a second grating structure, exposure and development processes in a manufacturing process of the grating structure are avoided, thereby simplifying production technology of the grating structure; and multiple daughterboards are successively produced by the one motherboard, multiple daughterboards can be simultaneously produced by multiple motherboards, and a mass production process of grating structures can be implemented. The imprinting glue film-coating process is additionally provided, a first metal film of an etching rate different from that of the substrate is selected, and when the substrate etching process is performed, power of an ion beam can be controlled to achieve an effect of accurately controlling substrate etching depth; and at the same time, an included angle of an emission line of the ion beam and a substrate surface is not a right angle, so that etching groove surfaces form inclined groove surfaces to obtain a target grating structure of which the substrate surface forms trapezoidal gaps.
Inventors:
WANG JING (CN)
Application Number:
PCT/CN2019/101517
Publication Date:
February 25, 2021
Filing Date:
August 20, 2019
Export Citation:
Assignee:
AAC OPTICS CHANGZHOU CO LTD (CN)
International Classes:
H01L21/02; G02B5/18
Foreign References:
| CN105334560A | 2016-02-17 | |||
| JPH06250007A | 1994-09-09 |
Other References:
JIANG KEMING: "Study of Antireflective Subwavelength Optical Elements based on Nanoimprint Lithography", CHINA MASTER'S THESES FULL-TEXT DATABASE-SOOCHOW UNIVERSITY, 15 December 2013 (2013-12-15), XP055783541
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
Download PDF: