Title:
MANUFACTURING PLANT AND METHOD FOR INSTALLING APPARATUS IN MANUFACTURING PLANT
Document Type and Number:
WIPO Patent Application WO/2023/033028
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide: a manufacturing plant that facilitates high-precision control of the state of a process chamber in which a prescribed process is performed, to a desired state, while suppressing energy consumption; and a method for installing an apparatus in a manufacturing plant. A manufacturing plant P1 according to one embodiment of the present invention comprises: a processing system 1 that is provided with a processing device 2 having a process chamber 3 to which is supplied a gas received at a gas introduction port 5A; a heat transfer medium supply system 10 that is provided with a gas supply device 100 that supplies the gas from a gas supply port 11B; and a duct 30 that connects the gas introduction port 5A and the gas supply port 11B. The angle formed with respect to the vertical direction by a straight line L1 connecting the center of the gas supply port 11B and the center of the gas introduction port 5A is 0-45 degrees.
Inventors:
TAKAYAMA MICHIO (JP)
MORIMUNE AYUMI (JP)
YAMAGUCHI SYUNJI (JP)
AOKI KOICHIRO (JP)
MORIMUNE AYUMI (JP)
YAMAGUCHI SYUNJI (JP)
AOKI KOICHIRO (JP)
Application Number:
PCT/JP2022/032730
Publication Date:
March 09, 2023
Filing Date:
August 31, 2022
Export Citation:
Assignee:
SHINWA CONTROLS CO LTD (JP)
International Classes:
H01L21/02; H01L21/027
Domestic Patent References:
| WO2018154993A1 | 2018-08-30 |
Foreign References:
| JP2019169681A | 2019-10-03 | |||
| JP2017137526A | 2017-08-10 | |||
| JP2001015578A | 2001-01-19 |
Attorney, Agent or Firm:
MIYAJIMA Manabu et al. (JP)
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