MANUFACTURING PROCESS MONITORING DEVICE

WIPO Patent Application WO/2020/044533

A1

Provided is a manufacturing process monitoring device which does not require a threshold for determining an abnormality and can determine an abnormality in a manufacturing process. The manufacturing process monitoring device is provided with: a data conversion unit which performs conversion on process data of a manufacturing facility; a feature amount analysis unit which analyzes the converted data on the basis of feature amount information; a data recovery unit which recovers data for each of a plurality of categories on the basis of the feature amount information and information about the analyzed result; a similarity calculation unit which calculates the similarity for each of the plurality of categories on the basis of the recovered data and data used at the time of analyzing; a category determination unit which determines the category of the data on the basis of the similarity for each of the plurality of categories; a category classifying unit which classifies a category to which the process data belongs; and a process state diagnosis unit which diagnoses the state of the manufacturing process on the basis of a comparison result of the determined category and the classified category.

TEZUKA TOMOYUKI (JP)
INAMI HARUKI (JP)
KAMEYAMA WATARU (JP)
SUGANUMA MUTSUMI (JP)

PCT/JP2018/032347

March 05, 2020

August 31, 2018

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TOSHIBA MITSUBISHI ELEC IND (JP)

G05B23/02; B21B38/00; B21C51/00

WO2017145318A1	2017-08-31
WO2015177870A1	2015-11-26
WO2017134772A1	2017-08-10
WO2018096682A1	2018-05-31

JP2011243118A

2011-12-01

TAKADA, Mamoru et al. (JP)

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