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Patent Searching and Data


Title:
MASK AND MANUFACTURING METHOD THEREFOR, AND MASK ASSEMBLY AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/226187
Kind Code:
A1
Abstract:
The present application relates to a mask. A mask opening area is in a first initial shape before tensioning, and the mask opening area is in a first target shape in a vapor deposition process; the first initial shape is different from the first target shape; the first initial shape has a compensation pattern for the first target shape, and the compensation pattern has a tension deformation pattern and a thermal deformation pattern. In this way, non-uniform deformation of the mask due to thermal and mechanical coupling of the mask in the processes of tensioning in different directions and vapor deposition is pre-compensated for, the deviation between the positions of mask openings on the mask and the positions of corresponding pixel openings on a display substrate is reduced, the difference between an actual vapor-deposited coating boundary and a design value is alleviated, the vapor deposition precision can be ensured, poor color mixing is effectively improved, and the product yield is increased. The present application further provides a manufacturing method for the mask, a mask assembly and a manufacturing method for the mask assembly.

Inventors:
LI WEILI (CN)
LI WENXING (CN)
ZANG GONGZHENG (CN)
HAN BING (CN)
ZHANG JISHUAI (CN)
CHEN MUDAN (CN)
Application Number:
PCT/CN2022/109401
Publication Date:
November 30, 2023
Filing Date:
August 01, 2022
Export Citation:
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Assignee:
KUNSHAN GOVISIONOX OPTOELECTRONICS CO LTD (CN)
International Classes:
C23C14/04; C23C14/24
Domestic Patent References:
WO2021072681A12021-04-22
Foreign References:
CN110188502A2019-08-30
CN112996944A2021-06-18
CN208604190U2019-03-15
US5581324A1996-12-03
Attorney, Agent or Firm:
ACIP LAW OFFICES (CN)
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