Title:
MASK AND MANUFACTURING METHOD THEREFOR, AND MASK ASSEMBLY AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/226187
Kind Code:
A1
Abstract:
The present application relates to a mask. A mask opening area is in a first initial shape before tensioning, and the mask opening area is in a first target shape in a vapor deposition process; the first initial shape is different from the first target shape; the first initial shape has a compensation pattern for the first target shape, and the compensation pattern has a tension deformation pattern and a thermal deformation pattern. In this way, non-uniform deformation of the mask due to thermal and mechanical coupling of the mask in the processes of tensioning in different directions and vapor deposition is pre-compensated for, the deviation between the positions of mask openings on the mask and the positions of corresponding pixel openings on a display substrate is reduced, the difference between an actual vapor-deposited coating boundary and a design value is alleviated, the vapor deposition precision can be ensured, poor color mixing is effectively improved, and the product yield is increased. The present application further provides a manufacturing method for the mask, a mask assembly and a manufacturing method for the mask assembly.
Inventors:
LI WEILI (CN)
LI WENXING (CN)
ZANG GONGZHENG (CN)
HAN BING (CN)
ZHANG JISHUAI (CN)
CHEN MUDAN (CN)
LI WENXING (CN)
ZANG GONGZHENG (CN)
HAN BING (CN)
ZHANG JISHUAI (CN)
CHEN MUDAN (CN)
Application Number:
PCT/CN2022/109401
Publication Date:
November 30, 2023
Filing Date:
August 01, 2022
Export Citation:
Assignee:
KUNSHAN GOVISIONOX OPTOELECTRONICS CO LTD (CN)
International Classes:
C23C14/04; C23C14/24
Domestic Patent References:
| WO2021072681A1 | 2021-04-22 |
Foreign References:
| CN110188502A | 2019-08-30 | |||
| CN112996944A | 2021-06-18 | |||
| CN208604190U | 2019-03-15 | |||
| US5581324A | 1996-12-03 |
Attorney, Agent or Firm:
ACIP LAW OFFICES (CN)
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