Title:
MASK PLATE
Document Type and Number:
WIPO Patent Application WO/2021/082549
Kind Code:
A1
Abstract:
A mask plate, comprising: a frame (101), an opening (102) surrounded by the frame (101), a shielding portion (103), and at least one connecting portion (104) connecting the shielding portion (103) and the frame (101); the shielding portion (103) is arranged in the opening (102); in a direction perpendicular to the mask plate, the connecting portion (104) includes a first part (1041) arranged close to a substrate (201) to be evaporated and a second part (1042) arranged away from the substrate (201) to be evaporated; the vertical projection of the second part (1042) covers the vertical projection of the first part (1041); and the area of the cross section of the first part (1041) parallel to the mask plate gradually decreases along the direction away from the second part (1042).
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Inventors:
ZHANG ZHIYUAN (CN)
Application Number:
PCT/CN2020/104350
Publication Date:
May 06, 2021
Filing Date:
July 24, 2020
Export Citation:
Assignee:
KUNSHAN GOVISIONOX OPTOELECTRONICS CO LTD (CN)
International Classes:
C23C14/24; C23C14/04
Foreign References:
| CN110629158A | 2019-12-31 | |||
| CN110018610A | 2019-07-16 | |||
| CN108517489A | 2018-09-11 | |||
| CN108277473A | 2018-07-13 | |||
| CN201911053494A | 2019-10-31 |
Other References:
See also references of EP 3967787A4
Attorney, Agent or Firm:
BEIJING YZH IP FIRM (CN)
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