Title:
MASK
Document Type and Number:
WIPO Patent Application WO/2019/080875
Kind Code:
A1
Abstract:
A mask (10), comprising a dummy region (120) and at least one effective deposition region (110), the dummy region (120) being disposed at an outer side of the effective deposition region (110); multiple first through holes (111) are disposed in the at least one effective deposition region (110); multiple second through holes (121) are disposed in the dummy region (120), the second through holes (121) having an identical shape to the first through holes (111), dimensions of the second through holes (121) being equal to dimensions of the first through holes (111), and spacing between the second through holes (121) being identical to spacing between the first through holes (111).
Inventors:
SU JUNHAI (CN)
GONG JIANGUO (CN)
WU JUNXIONG (CN)
RAN YINGGANG (CN)
KE XIANJUN (CN)
LI JIANHUA (CN)
GONG JIANGUO (CN)
WU JUNXIONG (CN)
RAN YINGGANG (CN)
KE XIANJUN (CN)
LI JIANHUA (CN)
Application Number:
PCT/CN2018/111670
Publication Date:
May 02, 2019
Filing Date:
October 24, 2018
Export Citation:
Assignee:
TRULY HUIZHOU SMART DISPLAY LTD (CN)
International Classes:
C23C14/24; C23C14/04; H01L27/32; H01L51/56
Foreign References:
| CN107815641A | 2018-03-20 | |||
| CN107460436A | 2017-12-12 | |||
| CN102201550A | 2011-09-28 | |||
| CN205576262U | 2016-09-14 | |||
| CN104846328A | 2015-08-19 | |||
| CN103014618A | 2013-04-03 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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