Title:
MASS FLOW CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2016/035558
Kind Code:
A1
Abstract:
A mass flow controller (1) is configured from a flow meter (2), a mechanical pressure control valve (3) which is positioned upstream of and adjacent to the flow meter, and a flow control valve (4) which is positioned downstream of the flow meter. Thus, provided is a mass flow controller which is capable of, even if pressure (P1) upstream of the flow meter fluctuates, instantly recovering the pressure to original pressure and thereby improving precision in flow measurement which the flow meter performs. It would be preferable for the mechanical pressure control valve (3) to be embedded in a base part (7) of the mass flow controller (1). It would be additionally preferable for the mass flow controller (1) to further comprise a forced open valve mechanism (10) which forcibly opens the mechanical pressure control valve (3).
Inventors:
HIROTA TOMOKAZU (JP)
ITO HIROYUKI (JP)
ITO HIROYUKI (JP)
Application Number:
PCT/JP2015/073323
Publication Date:
March 10, 2016
Filing Date:
August 20, 2015
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
G05D7/06
Foreign References:
| JP2004164033A | 2004-06-10 | |||
| JP2004157719A | 2004-06-03 | |||
| JP2002032130A | 2002-01-31 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
Patent business corporation Pros Peck patent firm (JP)
Patent business corporation Pros Peck patent firm (JP)
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