Title:
MASS FLOW CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2019/119757
Kind Code:
A1
Abstract:
The present invention relates to the technical field of semiconductors, and in particular to a mass flow controller comprising gas inlet pipelines, gas outlet pipelines and a control assembly, wherein there are multiple gas inlet pipelines and/or gas outlet pipelines, one end of each gas inlet pipeline is a gas inlet and the other end thereof is in communication with gas outlet pipelines, the gas inlet pipelines are all provided with a potential monitoring element, the control assembly is connected to the potential monitoring element, and the control assembly controls the gas flow of the gas inlet pipelines and the gas outlet pipelines. In order to achieve the purpose of uniformly mixing various gases first and then uniformly supplying gas, according to the present invention, multiple gas inlet pipelines and multiple gas outlet pipelines can be provided, and the control assembly controls the gas flow of each gas inlet pipeline and each gas outlet pipeline, thus satisyfing requirements for uniform gas mixing and uniform gas supply. Thus, according to the present invention, the matching of multiple gas inlet pipelines and multiple gas outlet pipelines can greatly save on the design costs of gas distribution pipelines and the device purchase costs can be greatly saved on, and the space of a gas distribution box body can be reduced; and the use of the mass flow controller can replace multiple individual common mass flow controllers.
Inventors:
ZHAO QINGSONG (CN)
NAN JIANHUI (CN)
NAN JIANHUI (CN)
Application Number:
PCT/CN2018/092213
Publication Date:
June 27, 2019
Filing Date:
June 21, 2018
Export Citation:
Assignee:
BEIJING CHUANGYU TECH CO LTD (CN)
International Classes:
G05D7/06
Domestic Patent References:
| WO2004063679A1 | 2004-07-29 |
Foreign References:
| US20120000542A1 | 2012-01-05 | |||
| CN107844133A | 2018-03-27 | |||
| CN101055203A | 2007-10-17 | |||
| CN104969136A | 2015-10-07 |
Attorney, Agent or Firm:
KANGXIN PARTNERS, P.C. (CN)
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