Title:
MASS FLOW CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2024/057731
Kind Code:
A1
Abstract:
Provided is a mass flow controller in which the flow rate at an action position, which is a position where a fluid acts, is controlled to different flow rates in accordance with a supply period, wherein a valve opening degree signal is outputted to a flow rate control valve such that a flow rate measurement value identified on the basis of a flow rate signal is greater than a first setting value that is a non-zero flow rate setting value in a period from a first time point at which the first setting value is inputted to a flow rate setting means until a second time point at which it is assessed that the fluid has reached the action position, a valve opening degree signal is outputted to the flow rate control valve such that the flow rate measurement value matches the first setting value in a period from the second time point until a third time point at which a second setting value that is a flow rate setting value lower than the first setting value is inputted to the flow rate setting means, and a valve opening degree signal is outputted to the flow rate control valve such that the flow rate measurement value matches the second setting value in a period from the third time point until a time point at which the first setting value is subsequently inputted, whereby startup delay and slowdown in the flow rate of the fluid at the action point are suppressed.
Inventors:
GOTO TAKAO (JP)
Application Number:
PCT/JP2023/027179
Publication Date:
March 21, 2024
Filing Date:
July 25, 2023
Export Citation:
Assignee:
PROTERIAL LTD (JP)
International Classes:
G05D7/06; H01L21/31
Domestic Patent References:
| WO2021030364A1 | 2021-02-18 |
Foreign References:
| JP2019047035A | 2019-03-22 | |||
| JP2021508129A | 2021-02-25 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
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