Title:
MASS FLOW RATE CONTROL DEVICE AND DIAGNOSTIC METHOD FOR DIFFERENTIAL PRESSURE-TYPE FLOWMETER
Document Type and Number:
WIPO Patent Application WO/2017/057129
Kind Code:
A1
Abstract:
According to the present invention, a recording means records the value of the pressure of a fluid on the downstream side of a differential pressure generation means in the period from a flow rate control valve being opened and control of the flow rate being started or the flow rate control valve being closed and control of the flow rate being stopped until the measured flow rate becomes stable. A diagnosis means makes a comparison between a management value acquired on the basis of the value of the pressure of the fluid on the downstream side recorded by the recording means and a management value for when a fault is absent in the flowmeter, and diagnoses the occurrence of a fault in the flowmeter when the absolute value of the difference between the management values exceeds a threshold value. Preferably, a mechanical-type pressure-regulating valve is further disposed adjacent to the upstream side of the flowmeter. It is thereby possible to provide a mass flow rate control device and a diagnostic method for a differential pressure-type flowmeter with which it is possible to diagnose, in a simple manner, the occurrence of a fault in a differential pressure-type flowmeter without providing a time dedicated to performing a diagnosis exclusively.
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Inventors:
GOTOH TAKAO (JP)
Application Number:
PCT/JP2016/077837
Publication Date:
April 06, 2017
Filing Date:
September 21, 2016
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
International Classes:
G05D7/06
Foreign References:
| JP2005534110A | 2005-11-10 | |||
| JP2010091320A | 2010-04-22 | |||
| JP2012226627A | 2012-11-15 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
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