Title:
MASS SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/198433
Kind Code:
A1
Abstract:
Provided is a mass sensor having a four-corner-adjustment mechanism capable of reducing the sensitivity of four-corner adjustment without lowering the rigidity of a Roberval mechanism. A mass sensor (1) includes a Roberval mechanism (2) in which a floating frame (21) and fixed part (22) are coupled by upper and lower sub-rods (23, 24) having thin parts (23b) formed thereon, and a four-corner-adjustment mechanism (4) for parallelization. The four-corner-adjustment mechanism (4) has an adjustment screw (41) and an upper elastic member (42u) and lower elastic member (42d) that are disposed in series in the vertical direction so as to sandwich the sub-rod (23) subjected to parallelization.
Inventors:
IZUMO NAOTO (JP)
SUZAKI SATOSHI (JP)
SUZAKI SATOSHI (JP)
Application Number:
PCT/JP2014/066932
Publication Date:
December 30, 2015
Filing Date:
June 26, 2014
Export Citation:
Assignee:
A&D CO LTD (JP)
International Classes:
G01G23/01; G01G21/24
Domestic Patent References:
| WO2005031286A1 | 2005-04-07 |
Foreign References:
| JPH0672034U | 1994-10-07 |
Other References:
See also references of EP 3163268A4
Attorney, Agent or Firm:
YAGI Hidehito et al. (JP)
Hideto Yagi (JP)
Hideto Yagi (JP)
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