Title:
MASS TRANSFER APPARATUS AND MASS TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2021/237568
Kind Code:
A1
Abstract:
A mass transfer apparatus and a mass transfer method. The mass transfer apparatus comprises a laser (100), a coupling unit (200), an optical fiber (300), a ceramic ferrule (400), and a coaxial focusing structure (500) that are connected in succession; laser light outputted by the laser (100) passes through the coupling unit (200) and is coupled into the optical fiber (300), the coaxial focusing structure (500) is fixed onto the tip of the ceramic ferrule (400), and the tip of the optical fiber (300) is inserted into the ceramic ferrule (400). The coaxial focusing structure (500) is controlled by means of a motor (800) and a telescopic sliding rod (700) to achieve a spiral laser scanning trajectory, thus using a high precision means to control the operating trajectory of laser scanning, and increasing the transfer efficiency and product yield of a Micro-LED.
Inventors:
JIANG GUANGPING (CN)
XU SHIYUAN (CN)
XU SHIYUAN (CN)
Application Number:
PCT/CN2020/092913
Publication Date:
December 02, 2021
Filing Date:
May 28, 2020
Export Citation:
Assignee:
CHONGQING KONKA PHOTOELECTRIC TECH RESEARCH INSTITUTE CO LTD (CN)
International Classes:
H01L21/67; B23K26/08
Foreign References:
| CN108431949A | 2018-08-21 | |||
| CN102664221A | 2012-09-12 | |||
| CN108565248A | 2018-09-21 | |||
| CN106994557A | 2017-08-01 | |||
| CN103675984A | 2014-03-26 | |||
| CN103904558A | 2014-07-02 | |||
| US20140102643A1 | 2014-04-17 |
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY (SHENZHEN) (CN)
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