Title:
MASS TRANSFER DEVICE AND MASS TRANSFER METHOD
Document Type and Number:
WIPO Patent Application WO/2021/253332
Kind Code:
A1
Abstract:
The present invention relates to a mass transfer device and a mass transfer method. The device comprises a laser used for emitting a laser beam, a first lens used for shaping the laser beam into an annular light spot, a second lens used for guiding the circular ring light spot to a first substrate loaded with a micro light emitting diode chip to be transferred, and a transmission assembly fixed to the second lens and used for moving the second lens to adjust the distance between the first lens and the second lens so as to adjust the diameter of the annular light spot.
Inventors:
JIANG GUANGPING (CN)
XU SHIYUAN (CN)
XU SHIYUAN (CN)
Application Number:
PCT/CN2020/096843
Publication Date:
December 23, 2021
Filing Date:
June 18, 2020
Export Citation:
Assignee:
CHONGQING KONKA PHOTOELECTRIC TECH RESEARCH INSTITUTE CO LTD (CN)
International Classes:
H01L33/02; H01L21/67; H01L27/15
Foreign References:
| CN109545815A | 2019-03-29 | |||
| CN111095516A | 2020-05-01 | |||
| CN108878602A | 2018-11-23 | |||
| CN109411501A | 2019-03-01 |
Attorney, Agent or Firm:
JOHNSON INTELLECTUAL PROPERTY AGENCY(SHENZHEN) (CN)
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