Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2015/182333
Kind Code:
A1
Abstract:
A measurement device provided with: a capturing unit for causing to-be-detected particles contained in a gas to be captured in a liquid, and causing a fluorescent substance that specifically binds to the to-be-detected particles to bind to the to-be-detected particles in the liquid; a droplet formation unit for forming an aerosol of droplets from the liquid supplied from the trapping unit; and a measurement unit for illuminating the droplets with light and measuring the fluorescent intensity of the droplets. The capturing unit has a cyclone that has a gas introduction unit, a liquid introduction unit, and a cyclone body. The cyclone causes gas introduced from the gas introduction unit to circle in the circumferential direction of the wall of the cyclone body and causes the to-be-detected particles within the gas to be separated under centrifugal force towards the wall of the cyclone body. The cyclone is capable of introducing the liquid from the liquid introduction unit, capturing within the liquid the to-be-detected particles separated towards the wall of the cyclone body, and continuously supplying the liquid to the droplet formation unit.
Inventors:
TAMURA AKITAKE (JP)
Application Number:
PCT/JP2015/063080
Publication Date:
December 03, 2015
Filing Date:
May 01, 2015
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01N21/64
Foreign References:
| JP2012052866A | 2012-03-15 | |||
| US6103534A | 2000-08-15 | |||
| JP2007526478A | 2007-09-13 | |||
| JP2014081230A | 2014-05-08 | |||
| JP2011152109A | 2011-08-11 |
Other References:
See also references of EP 3150994A4
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (JP)
Katsunuma Hirohito (JP)
Katsunuma Hirohito (JP)
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