Title:
MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/035426
Kind Code:
A1
Abstract:
Provided is a measurement device which has an inexpensive configuration, is capable of maintaining detection sensitivity, and does not require signal read time. This measurement device is provided with: a light source; a measurement optical system which shapes measurement light from the light source into a line beam, and guides said measurement light to an object to be examined; a light receiving optical system which uses a line sensor obtained by arranging pixels in a tangential direction to receive the measurement light that has passed through the object to be examined, and generates an output signal; and a signal processing means which processes the output signal and outputs measurement information about the object to be examined. In the light receiving optical system, light spots, which are obtained by forming, on the line sensor, an image of object points on the object to be examined, include light reception regions of at least two adjacent pixels in the tangential direction of the line sensor, and form an image such that entry occurs in the sagittal direction of the light reception regions of the pixels.
Inventors:
IKEGAMI TOMOYUKI (JP)
Application Number:
PCT/JP2018/030105
Publication Date:
February 21, 2019
Filing Date:
August 10, 2018
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
A61B3/10; G01N21/17
Foreign References:
| JP2017522066A | 2017-08-10 |
Other References:
HUANG SHU-WEI, NEW TECHNOLOGIES FOR OPTICAL COHERENCE MICROSCOPY, 13 July 2010 (2010-07-13), XP055575850, Retrieved from the Internet
FECHTIG J. DANIEL ET AL.: "Line-field parallel swept source interferometric imaging at up to 1 MHz", OPTICS LETTERS, vol. 39, no. 18, 15 September 2014 (2014-09-15), pages 5333 - 5336, XP001591839, DOI: doi:10.1364/OL.39.005333
FECHTIG J. DANIEL ET AL.: "Line-field parallel swept source interferometric imaging at up to 1 MHz", OPTICS LETTERS, vol. 39, no. 18, 15 September 2014 (2014-09-15), pages 5333 - 5336, XP001591839, DOI: doi:10.1364/OL.39.005333
Attorney, Agent or Firm:
OKABE Yuzuru et al. (JP)
Download PDF: