Title:
MEASUREMENT INSTRUMENT
Document Type and Number:
WIPO Patent Application WO/2020/246444
Kind Code:
A1
Abstract:
The present disclosure provides a measurement instrument that can reduce damage to a sensor unit. This sensor unit 41 has: a substrate 42; a pair of combtooth electrodes 43, 44 that are provided on a first main surface 42a; and a pair of rear surface electrodes that are provided on a second main surface and respectively correspond to the pair of combtooth electrodes 43, 44. Each of the pair of combtooth electrodes 43, 44 has a plurality of tooth parts 52-56, 62-67 and connection parts 51, 61 connecting the tooth parts 52-56, 62-67 to each other. The substrate 42 has via hole conductors C1, C2 provided at positions corresponding to the tooth parts inside an area Ar1 surrounded by the connection parts 51, 61 and the outer tooth parts 52, 62, 63 located at both ends in a direction in which the tooth parts 52-56, 62-67 are lined up inside the pair of combtooth electrodes 43, 44, and the via hole conductors C1, C2 connect the combtooth electrodes 43, 44 and the rear surface electrodes.
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Inventors:
TAKAGI JUN (JP)
TANAKA KENJI (JP)
TAKAHASHI TOMOKI (JP)
TANAKA KENJI (JP)
TAKAHASHI TOMOKI (JP)
Application Number:
PCT/JP2020/021677
Publication Date:
December 10, 2020
Filing Date:
June 02, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01D11/24
Foreign References:
| JP2009089869A | 2009-04-30 | |||
| JP2001189420A | 2001-07-10 | |||
| JP2002243689A | 2002-08-28 | |||
| JP2005114357A | 2005-04-28 | |||
| JP2006286772A | 2006-10-19 |
Attorney, Agent or Firm:
ONDA Makoto et al. (JP)
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