Title:
MEMBRANE DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2016/129111
Kind Code:
A1
Abstract:
Membranes of solid-state nanopore devices, which are considered promising for ascertaining structural features of DNA or analyzing base sequences, have conventionally been thick, and the accuracy of determining base sequences in DNA chains has been insufficient. A method for manufacturing a membrane device according to one aspect of the present invention involves: forming an insulation film, which is a first film, on a substrate that is a Si substrate; forming an Si film, which is a second film, on all or some of the surface of the first film; forming an insulating film, which is a third film, on the second film; forming a hole that passes through a portion of the third film positioned on the second film, but not through the second film; etching a portion of the substrate on one side of the first film with a solution by which the first film is not etched; and etching some or all of the second film on the other side of the first film with a gas or solution by which the first film is not etched, and which exhibits a third-film etching rate that is lower than the second-film etching rate, whereby a membrane region comprising the first film is formed.
Inventors:
YANAGI ITARU (JP)
TAKEDA KENICHI (JP)
TAKEDA KENICHI (JP)
Application Number:
PCT/JP2015/054002
Publication Date:
August 18, 2016
Filing Date:
February 13, 2015
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01N27/00; G01N27/06
Foreign References:
| JP2006108491A | 2006-04-20 | |||
| JP2002090219A | 2002-03-27 | |||
| US20130092541A1 | 2013-04-18 | |||
| JP2012040619A | 2012-03-01 |
Other References:
ITARU YANAGI ET AL.: "Fabricating nanopores with diameters of sub-1 nm to 3 nm using multilevel pulse-voltage injection", SCIENTIFIC REPORTS, vol. 4, 21 May 2014 (2014-05-21), pages 5000-1 - 5000-7
Attorney, Agent or Firm:
SEIRYO I. P. C. (JP)
青稜 patent business corporation (JP)
青稜 patent business corporation (JP)
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