MEMBRANE PROBE CARD AND PROBE HEAD THEREOF

WIPO Patent Application WO/2023/092899

A1

A membrane probe card and a probe head thereof. The membrane probe card comprises a membrane probe head (3), the membrane probe head (3) comprising a support body (31), a membrane (32), a probe (33) and an interconnection wire (34), wherein a bevel support structure (35) is provided between an operation surface (311) of the support body (31) and the membrane (32); the bevel support structure (35) comprises a bevel structure (351) and a supporting elastic layer (352); the bevel structure (351) comprises one or more bevels (3511), the bevel (3511) facing the probe (33) and corresponding to the position of the probe (33); and the supporting elastic layer (352) is padded between the bevel structure (351) and the membrane (32), and the supporting elastic layer (352) matches and fits with the bevel structure (351), such that the portions of the supporting elastic layer (352) on two sides of each probe (33) have a thickness difference.

JP2002318248	PROBE PIN FOR PROBE CARD
JP6484310	Test circuit board and its operation method
WO/1993/006496	METHOD FOR PRODUCING AN ACCESSORY FOR USE IN THE TESTING OF SEMICONDUCTOR DEVICES

ZHAO LIANGYU (CN)
YU HAICHAO (CN)
WANG AILIN (CN)

PCT/CN2022/080761

June 01, 2023

March 14, 2022

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MAXONE SEMICONDUCTOR CO LTD (CN)

G01R1/073; G01R31/26; H01L21/66

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CN105358991A	2016-02-24
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CN112384811A	2021-02-19
US5180977A	1993-01-19
CN108279368A	2018-07-13
CN112119315A	2020-12-22
TW200846669A	2008-12-01
CN1851476A	2006-10-25
US5461326A	1995-10-24
CN101520501A	2009-09-02

SUZHOU CREATOR PATENT AND TRADEMARK AGENCY, LTD. (CN)

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