Title:
MEMS CAPACITIVE SWITCH
Document Type and Number:
WIPO Patent Application WO/2021/237769
Kind Code:
A1
Abstract:
The present utility model provides an MEMS capacitive switch, comprising a substrate, a dielectric layer provided on the surface of the substrate, a metal beam erected above the dielectric layer by means of anchor points, an effective electrode provided on the surface of the dielectric layer and opposite to the metal beam, driving electrodes provided on the peripheral side of the effective electrode, and dielectric columns provided between the driving electrodes and the metal beam; and the dielectric columns are made of a flexible material. In the present utility model, during the movement process of being pulled to an effective capacitance under the action of an electrostatic force, the metal beam hits the dielectric columns, and the dielectric columns are made of a flexible material and thus can be compressed, such that a lower surface of the metal beam is in complete contact with an upper surface of the effective capacitance, thereby improving the off-state capacitance.
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Inventors:
KONG LINGCHENG (CN)
ZHU YANQING (CN)
WANG CHAO (CN)
LI YANG (CN)
ZHU YANQING (CN)
WANG CHAO (CN)
LI YANG (CN)
Application Number:
PCT/CN2020/094162
Publication Date:
December 02, 2021
Filing Date:
June 03, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H01H36/00; B81B3/00; B81B7/02; H01H59/00
Foreign References:
| CN101276707A | 2008-10-01 | |||
| JP2012154629A | 2012-08-16 | |||
| CN105428162A | 2016-03-23 | |||
| CN102386021A | 2012-03-21 | |||
| CN1501545A | 2004-06-02 |
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
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