MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION

Title:

MEMS DEVICE AND ELECTRONIC INSTRUMENT HAVING PROJECTOR FUNCTION

Document Type and Number:

WIPO Patent Application WO/2013/114917

Kind Code:

A1

Abstract:

In this MEMS device (1), first drive units (40) are divided into first drive portions (41) and second drive portions (42). Second drive units (50) are divided into third drive portions (51) and fourth drive portions (52). The first drive portions, the second drive portions, the third drive portions, and the fourth drive portions are driven and controlled independently of each other, and an optical component (10) is thereby tilted.

Inventors:

MURAYAMA MANABU (JP)
KUGO KOUICHI (JP)
INOUE NAOKI (JP)
FUJII HITOSHI (JP)

Application Number:

PCT/JP2013/050133

Publication Date:

August 08, 2013

Filing Date:

January 08, 2013

Export Citation:

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Assignee:

FUNAI ELECTRIC CO (JP)

International Classes:

B81B3/00; G02B26/10

Domestic Patent References:

WO2005122380A1

2005-12-22

Foreign References:

JP2010148265A

2010-07-01

Other References: