Title:
MEMS DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/155663
Kind Code:
A1
Abstract:
This MEMS device is provided with: a piezoelectric film; a first electrode and a second electrode, by which the piezoelectric film is sandwiched; a protective film which is arranged so as to cover at least a part of the second electrode, and which has an opening that opens to a part of the second electrode; a third electrode which is in contact with the second electrode at least in the opening, and which is arranged so as to cover at least a part of the protective film; and a first wiring layer which has a first contact part that is in contact with the third electrode.
Inventors:
UMEDA KEIICHI (JP)
OKAWA TADAYUKI (JP)
KAMOTO TAKU (JP)
GOTO YUICHI (JP)
INOUE YOSHIHISA (JP)
KISHI TAKEHIKO (JP)
OKAWA TADAYUKI (JP)
KAMOTO TAKU (JP)
GOTO YUICHI (JP)
INOUE YOSHIHISA (JP)
KISHI TAKEHIKO (JP)
Application Number:
PCT/JP2018/031559
Publication Date:
August 15, 2019
Filing Date:
August 27, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B81B3/00; B81C3/00; H01L41/047; H01L41/053; H01L41/09; H01L41/113; H01L41/187; H03H9/24
Domestic Patent References:
| WO2017203757A1 | 2017-11-30 | |||
| WO2017047663A1 | 2017-03-23 |
Foreign References:
| US20150041932A1 | 2015-02-12 | |||
| JP2006140271A | 2006-06-01 |
Other References:
See also references of EP 3730453A4
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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