Title:
MEMS DIAPHRAGM STRUCTURE AND ITS FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/069365
Kind Code:
A1
Abstract:
A diaphragm (14) is formed by using MEMS technique. The diaphragm (14) has a hinge
structure. At least one of the hinge upper corner part and the hinge lower corner
part of the diaphragm (14) is rounded.
Inventors:
MIYOSHI YUICHI
Application Number:
PCT/JP2006/315379
Publication Date:
June 21, 2007
Filing Date:
August 03, 2006
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
MIYOSHI YUICHI
MIYOSHI YUICHI
International Classes:
H04R19/04; H01L29/84; H04R7/04; H04R19/01; H04R31/00; G01P15/125
Foreign References:
| JP2001518246A | 2001-10-09 | |||
| JP2001231099A | 2001-08-24 | |||
| US6168906B1 | 2001-01-02 |
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (5-7 Hommachi 2-chome, Chuo-ku, Osaka-sh, Osaka 53, JP)
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