Title:
MEMS MICROPHONE DEVICE AND ELECTRONICS APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/064803
Kind Code:
A1
Abstract:
The present invention discloses a MEMS microphone device and an electronics apparatus. The MEMS microphone device comprises: a substrate; a MEMS microphone element placed on the substrate; a cover encapsulating the MEMS microphone element together with the substrate; and an acoustic port for the MEMS microphone element, wherein a compliant membrane is provided to seal the acoustic port, and the membrane has a mechanical stiffness lower than that of the diaphragm of the MEMS microphone element.
Inventors:
ZOU QUANBO (CN)
Application Number:
PCT/CN2016/101473
Publication Date:
April 12, 2018
Filing Date:
October 08, 2016
Export Citation:
Assignee:
GOERTEK INC (CN)
International Classes:
H04R19/04
Foreign References:
| CN204733381U | 2015-10-28 | |||
| CN204334948U | 2015-05-13 | |||
| CN104760924A | 2015-07-08 | |||
| JPH08307990A | 1996-11-22 | |||
| US8447057B2 | 2013-05-21 |
Attorney, Agent or Firm:
BEYOND TALENT PATENT AGENT FIRM (CN)
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