Title:
MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2021/000070
Kind Code:
A1
Abstract:
Provided in the present invention is a MEMS microphone, comprising a base having a rear cavity and a capacitor system arranged on the base, the capacitor system comprising a backplate and a diaphragm, the backplate and the diaphragm being spaced apart opposite to one another to form an acoustic cavity, a piezoelectric diaphragm being attached to the side of the diaphragm furthest from the acoustic cavity, and the piezoelectric diaphragm deforming with the deformation of the diaphragm to thereby produce a charge output; thus, the MEMS microphone can output two sets of electrical signals, including a set of electrical signals outputted by the capacitor system and a set of electrical signals outputted by the piezoelectric diaphragm, improving the sensitivity of the microphone.
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Inventors:
TONG BEI (CN)
ZHAN ZHAN (CN)
LI YANG (CN)
LAI KAH KEEN (CN)
ZHONG XIAOHUI (CN)
DUAN LIAN (CN)
ZHAN ZHAN (CN)
LI YANG (CN)
LAI KAH KEEN (CN)
ZHONG XIAOHUI (CN)
DUAN LIAN (CN)
Application Number:
PCT/CN2019/093949
Publication Date:
January 07, 2021
Filing Date:
June 29, 2019
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECH NANJING CO LTD (CN)
AAC TECH NANJING CO LTD (CN)
International Classes:
H04R19/04
Foreign References:
| US20170265009A1 | 2017-09-14 | |||
| US20170265009A1 | 2017-09-14 | |||
| CN105792084A | 2016-07-20 | |||
| CN107812691A | 2018-03-20 | |||
| CN206908855U | 2018-01-19 |
Attorney, Agent or Firm:
GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)
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