Title:
MEMS MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2024/000773
Kind Code:
A1
Abstract:
The present invention provides a MEMS microphone, comprising a substrate having a back cavity and a capacitor system provided on the substrate. The capacitor system comprises a back plate and a vibrating diaphragm provided opposite to the back plate; the vibrating diaphragm comprises a vibrating portion and a fixed portion surrounding the vibrating portion and fixed to the substrate; the vibrating portion and the fixed portion are spaced apart by a slit; the fixed portion is provided with a plurality of release portions; and the release portions penetrate through the fixed portion. Compared with the related technologies, the MEMS microphone provided by the present invention can improve the reliability of the back plate.
Inventors:
ZHAO ZHUANZHUAN (CN)
WANG KAIJIE (CN)
WANG LINLIN (CN)
ZHANG RUI (CN)
WANG KAIJIE (CN)
WANG LINLIN (CN)
ZHANG RUI (CN)
Application Number:
PCT/CN2022/114905
Publication Date:
January 04, 2024
Filing Date:
August 25, 2022
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H04R19/04; H04R7/00; H04R19/00
Foreign References:
| CN113395646A | 2021-09-14 | |||
| US20210136483A1 | 2021-05-06 | |||
| US20220182745A1 | 2022-06-09 | |||
| CN101516053A | 2009-08-26 | |||
| CN112492486A | 2021-03-12 | |||
| CN114339507A | 2022-04-12 |
Attorney, Agent or Firm:
SHENZHEN SANYONG INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (CN)
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