Title:
MEMS RESPIRATORY FLOW APPARATUS BASED ON NI FILM
Document Type and Number:
WIPO Patent Application WO/2023/098498
Kind Code:
A1
Abstract:
A MEMS respiratory flow apparatus based on a Ni film, which apparatus relates to the technical field of flexible flow sensors. The apparatus comprises an apparatus base (1), wherein a supporting leg (8) is fixedly connected at one side of the top face of the apparatus base (1), and a film substrate (5) is fixedly connected to the top faces of both the support leg (8) and the apparatus base (1). A film electrode (3) is a Ni film electrode, and is arranged above an air cavity (7), such that heat, which is generated when the Ni film electrode heats up, is prevented from transferring to the bottom, and it is ensured that the range of a temperature field generated by a flow measurement element is concentrated on the surface of a chip, thereby improving the measurement sensitivity and the measurement range, and also greatly reducing material costs. The apparatus has the characteristics of a circuit structure being simple, the measurement precision being high, the cost being low, the consistency being good, and the mechanical reliability being high, and the service life of the apparatus is also longer. On the basis of a wet etching process, the manufacturing and machining cost for the apparatus is lower, and the apparatus has a relatively good measurement consistency. A chip protection layer (2) can protect the interior of the chip from erosion by moisture, oxygen or other elements, thereby ensuring the high mechanical reliability of the chip while also improving the measurement stability of the chip.
Inventors:
CAI ZHIHUA (CN)
Application Number:
PCT/CN2022/133143
Publication Date:
June 08, 2023
Filing Date:
November 21, 2022
Export Citation:
Assignee:
LIGHT MOTION TECH SHENZHEN CO LTD (CN)
International Classes:
B81B7/02; G01P5/08
Foreign References:
| CN115047210A | 2022-09-13 | |||
| CN217739215U | 2022-11-04 | |||
| CN111220224A | 2020-06-02 | |||
| CN101290240A | 2008-10-22 | |||
| CN104891425A | 2015-09-09 | |||
| JPH0634411A | 1994-02-08 | |||
| FR2571493A1 | 1986-04-11 | |||
| CN107643421A | 2018-01-30 | |||
| US20120318058A1 | 2012-12-20 |
Attorney, Agent or Firm:
SHENZHEN YAYI PATENT AGENCY (ORDINARY PARTNERSHIP) (CN)
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