Title:
MEMS SOLENOID INDUCTOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/087972
Kind Code:
A1
Abstract:
Embodiments of the present application provide an MEMS solenoid inductor, comprising a silicon substrate, a soft magnetic core, and a solenoid, wherein the soft magnetic core is wrapped at the inner portion of the silicon substrate, the silicon substrate is provided with a spiral hole channel, the soft magnetic core passes through the center of the spiral hole channel, and the solenoid is provided in the spiral hole channel. By providing the soft magnetic core and solenoid of the inductor complete at the inner portion of the silicon substrate, the thickness of the silicon substrate is fully used, the obtained winding cross-section area of the inductor is large, the magnetic flux is increased, and the inductance value of the inductor is increased. Moreover, the silicon substrate can protect the soft magnetic core and the solenoid, the strength of the inductor is improved, and the impact resistance is good.
Inventors:
XU TIANTONG (CN)
TAO ZHI (CN)
LI HAIWANG (CN)
SUN JIAMIAN (CN)
TAO ZHI (CN)
LI HAIWANG (CN)
SUN JIAMIAN (CN)
Application Number:
PCT/CN2019/095062
Publication Date:
May 07, 2020
Filing Date:
July 08, 2019
Export Citation:
Assignee:
UNIV BEIHANG (CN)
International Classes:
H01F17/00; H01F27/245
Foreign References:
| CN101553890A | 2009-10-07 | |||
| CN109326421A | 2019-02-12 | |||
| CN109741903A | 2019-05-10 | |||
| JP2016051765A | 2016-04-11 | |||
| CN102682951A | 2012-09-19 |
Attorney, Agent or Firm:
CN-KNOWHOW INTELLECTUAL PROPERTY AGENT LIMITED (CN)
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