MEMS STRUCTURE-BASED ADJUSTABLE CAPACITOR

WIPO Patent Application WO/2022/027738

A1

The present invention relates to an MEMS structure-based adjustable capacitor, comprising a lower electrode plate A, a movable electrode plate B, an upper electrode plate C, a fixing device D and a connecting wire conductor E; the lower end of the fixing device D is fixedly connected to the lower electrode plate A, the upper end of the fixing device D is fixedly connected to the upper electrode plate C, the middle of the movable electrode plate B is provided with a structure B4 fitting the fixing device D and enabling free parallel movement, the movable electrode plate B is fixed in the middle of the fixing device D by means of the structure B4, and the movable electrode plate B is capable of moving up and down along the fixing device D; the lower electrode plate A is provided with a lower electrode A1, the movable electrode plate B is provided with a movable electrode B1, and an adjustment electrode B2; the lower electrode A1 and the movable electrode B1 constitute a unit capacitor; and the upper electrode plate C is provided with an upper electrode C1 and an adjustment electrode C2. The present invention not only has a high Q value, but also has the capabilities of high-voltage resistance and current resistance.

MENG QINGNAN (CN)

PCT/CN2020/110778

February 10, 2022

August 24, 2020

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ACCULA TECH HONG KONG COMPANY LIMITED (CN)
ACCULA ELECTRONIC TECH PTE LTD (SG)
ACCLUA TECH INC (CA)
ACCULA COMMUNICATION ELECTRONIC COMPANY PTE LTD (SG)

H01G5/38; H01G5/16

CN207587533U	2018-07-06
CN108400144A	2018-08-14
US20040008396A1	2004-01-15
CN104876176A	2015-09-02
CN103413681A	2013-11-27
CN108281286A	2018-07-13
US20160268052A1	2016-09-15

See also references of EP 4064305A4

BEIJING HUIZE INTELLECTUAL PROPERTY LAW LLC (CN)

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